Comission
President:
Prof. Jordi Pascual (UAB)
Secretary:
Dr. M. Isabel Alonso (ICMAB)
Members:
Dr. Jordi Fraxedas (ICMAB)
Prof. Benjamín Martínez (ICMAB)
Dr. Francesc Pérez-Murano (IMB-CNM)
Equipment
- Ultra-high vacuum system (Omicron) composed of Fast-entry-lock chamber and
main chamber for MBE deposition on 10cm wafers. - Sources:
Electron-beam evaporator for Si.
High temperature effusion cell for Ge.
Carbon sublimation source with a pyrolytic graphite filament.
High temperature effusion cell for B.
Low temperature effusion cell for Sb.
GaP decomposition cell for P2.
- Control instruments:
Process software.
Cross beam mass analyser for Si flux control or RGA.
Rate monitor (UHV quartz microbalance sensor head).
RHEED e-source (30 kV) and screen on lead glass.
